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能生产3nm!中国成功研发全新DUV光刻:完全不同于ASML
    
中国科学院成功研发出全新的全固态深紫外(DUV)激光器,可发射波长为193nm的相干光源,具有与ASML等公司现有技术完全不同的设计理念。该激光器采用自制的Yb:YAG晶体放大器生成1030nm的激光,通过两条不同的光学路径进行波长转换,最终生成193nm的激光光束。该技术有望应用于3nm工艺节点的半导体制造。然而,目前该激光器的输出功率仅为70mW,频率为6kHz,仍需进一步提升以满足商业化需求。

芯宇
国际光电工程学会

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能生产3nm!中国成功研发全新DUV光刻:完全不同于ASML
    
中国科学院成功研发出全新的全固态深紫外(DUV)激光器,可发射波长为193nm的相干光源,具有与ASML等公司现有技术完全不同的设计理念。该激光器采用自制的Yb:YAG晶体放大器生成1030nm的激光,通过两条不同的光学路径进行波长转换,最终生成193nm的激光光束。该技术有望应用于3nm工艺节点的半导体制造。然而,目前该激光器的输出功率仅为70mW,频率为6kHz,仍需进一步提升以满足商业化需求。

芯宇
国际光电工程学会

via Sky forever

📮投稿 ☘️频道 🌸聊天

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在花软件新闻投稿频道 Telegram | DID YOU KNOW?

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Why Telegram?

Telegram has no known backdoors and, even though it is come in for criticism for using proprietary encryption methods instead of open-source ones, those have yet to be compromised. While no messaging app can guarantee a 100% impermeable defense against determined attackers, Telegram is vulnerabilities are few and either theoretical or based on spoof files fooling users into actively enabling an attack.

Launched in 2013, Telegram allows users to broadcast messages to a following via “channels”, or create public and private groups that are simple for others to access. Users can also send and receive large data files, including text and zip files, directly via the app.The platform said it has more than 500m active users, and topped 1bn downloads in August, according to data from SensorTower.在花软件新闻投稿频道 from br


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